Assignment of Assignor's Interest

Recorded: 2014-01-02 Pages: 5

Assignors

ZHAO, JIANPING

Executed: 2013-10-14

CHEN, LEE

Executed: 2013-10-15

FUNK, MERRITT

Executed: 2013-10-14

SUNDARARAJAN, RADHA

Executed: 2013-11-05

Assignee

TOKYO ELECTRON LIMITED

AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Low Electron Temperature Microwave Surface-Wave Plasma (Swp) Processing Method and Apparatus

Patent: 8,968,588 →

Application: 13/436,458 →

Publication: US 2013/0256272

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.