Patent Assignment
Reel/Frame 031878/0551
Assignment of Assignor's Interest
Recorded: 2014-01-02
Pages: 4
Assignors
TSAI, HSIEN-CHIEH
Executed: 2013-11-06
LIN, TZ-WEI
Executed: 2013-11-06
YANG, SHENG-JEN
Executed: 2013-11-06
LIN, HUNG-YIN
Executed: 2013-11-06
TSUEI, CHERNG-CHANG
Executed: 2013-11-06
LU, CHEN-HSIANG
Executed: 2013-11-06
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED, INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Advanced Process Control Method for Controlling Width of Spacer and Dummy Sidewall in Semiconductor Device