Patent Assignment
Reel/Frame 031938/0665
Assignment of Assignor's Interest
Recorded: 2014-01-10
Pages: 5
Assignors
SHAMMA, NADER
Executed: 2013-12-10
VAN SCHRAVENDIJK, BART
Executed: 2013-12-10
REDDY, SIRISH
Executed: 2013-12-10
JI, CHUNHAI
Executed: 2013-12-10
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method for Forming a Mask by Etching Conformal Film on Patterned Ashable Hardmask