Patent Assignment
Reel/Frame 031942/0889
Assignment of Assignor's Interest
Recorded: 2014-01-10
Pages: 5
Assignors
LU, YEN-CHENG
Executed: 2013-09-23
YU, SHINN-SHENG
Executed: 2013-09-23
CHEN, JENG-HORNG
Executed: 2013-09-23
YEN, ANTHONY
Executed: 2013-09-23
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Extreme Ultraviolet Lithography Process and Mask