Patent Assignment
Reel/Frame 031952/0354
Assignment of Assignor's Interest
Recorded: 2014-01-13
Pages: 3
Assignor
DELGADO, GILDARDO
Executed: 2014-01-13
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 94550
Covered Property
(1)
Apparatus and Method for Multiplexed Multiple Discharge Plasma Produced Sources