Modifying Conversion

Recorded: 2014-01-09 Pages: 7

Assignor

CARL ZEISS SMT AG

Executed: 2010-10-14

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Device for Controlling Temperature of an Optical Element

Patent: 8,894,225 →

Application: 14/105,396 →

Publication: US 2014/0098352

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.