Patent Assignment
Reel/Frame 031964/0889
Assignment of Assignor's Interest
Recorded: 2014-01-14
Pages: 2
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD, HSINCHU SCIENCE PARK,, HSINCHU, 300, TAIWAN
Covered Property
(1)
Cleaning Module, Cleaning Apparatus and Method of Cleaning Photomask