Patent Assignment
Reel/Frame 031967/0049
Assignment of Assignor's Interest
Recorded: 2014-01-14
Pages: 4
Assignors
BRUGGER, MICHAEL
Executed: 2013-07-09
HOHENWARTER, KARL-HEINZ
Executed: 2013-07-09
SPITALER, DIETER
Executed: 2013-07-09
ANTON, GERALD
Executed: 2013-07-09
Assignee
LAM RESEARCH AG
SEZ STRASSE 1, VILLACH, A-9500, AUSTRIA
Covered Property
(1)
Method and Apparatus for Liquid Treatment of Wafer Shaped Articles