Patent Assignment
Reel/Frame 031973/0646
Assignment of Assignor's Interest
Recorded: 2014-01-15
Pages: 4
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHIN SUGITA CHO, ISOGO-KU, YOKOHAMA, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Charged Particle Beam Writing Apparatus, Method of Adjusting Beam Incident Angle to Target Object Surface, and Charged Particle Beam Writing Method