Patent Assignment
Reel/Frame 031989/0291
Assignment of Assignor's Interest
Recorded: 2014-01-16
Pages: 6
Assignors
CHEN, FENG
Executed: 2013-10-02
YANG, TSUNG-HAN
Executed: 2013-08-21
GAO, JUWEN
Executed: 2013-08-23
SHAVIV, ROEY
Executed: 2013-08-25
HUMAYUN, RAASHINA
Executed: 2013-08-22
WANG, DEQI
Executed: 2013-08-21
Assignee
NOVELLUS SYSTEMS, INC.
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Properties
(2)
Methods of Forming Tensile Tungsten Films and Compressive Tungsten Films
Methods of Forming Tensile Tungsten Films and Compressive Tungsten Films
Application:
61/666,466 →