Patent Assignment
Reel/Frame 032016/0392
Assignment of Assignor's Interest
Recorded: 2014-01-22
Pages: 2
Assignors
YAMAGUCHI, SHIN
Executed: 2014-01-07
HAYASHI, DAISUKE
Executed: 2014-01-08
KUDO, YASUHISA
Executed: 2014-01-08
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Mounting Table and Plasma Processing Apparatus