Patent Assignment
Reel/Frame 032051/0652
Assignment of Assignor's Interest
Recorded: 2014-01-27
Pages: 7
Assignors
LEVINSKI, VLADIMIR
Executed: 2013-12-18
FELER, YOEL
Executed: 2013-12-18
KANDEL, DANIEL
Executed: 2014-01-06
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Method and System for Providing a Target Design Displaying High Sensitivity to Scanner Focus Change