Patent Assignment
Reel/Frame 032062/0592
Assignment of Assignor's Interest
Recorded: 2014-01-28
Pages: 4
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Composition for Forming Resist Underlayer Film and Patterning Process