Patent Assignment
Reel/Frame 032070/0635
Assignment of Assignor's Interest
Recorded: 2014-01-16
Pages: 4
Assignor
NONAKA, RYO
Executed: 2014-01-16
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Mounting Table Temperature Control Device and Substrate Processing Apparatus