Patent Assignment
Reel/Frame 032077/0584
Assignment of Assignor's Interest
Recorded: 2014-01-29
Pages: 5
Assignors
NAKAGAWA, AKIRA
Executed: 2014-01-27
YAMAZAKI, FUMIO
Executed: 2013-12-20
MOCHIZUKI, HIROMI
Executed: 2013-12-23
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Etching Method