Patent Assignment
Reel/Frame 032097/0418
Assignment of Assignor's Interest
Recorded: 2014-01-30
Pages: 6
Assignors
BAMNOLKER, HANNA
Executed: 2013-12-17
HUMAYUN, RAASHINA
Executed: 2013-12-18
WANG, DEQI
Executed: 2013-12-18
GUAN, YAN
Executed: 2013-12-17
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method for Depositing Extremely Low Resistivity Tungsten