Patent Assignment
Reel/Frame 032105/0889
Assignment of Assignor's Interest
Recorded: 2014-01-31
Pages: 4
Assignors
BENVEGNU, DOMINIC J.
Executed: 2014-01-29
CHERIAN, BENJAMIN
Executed: 2014-01-29
DHANDAPANI, SIVAKUMAR
Executed: 2014-01-29
LEE, HARRY Q.
Executed: 2014-01-29
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Adjustment of Polishing Rates During Substrate Polishing with Predictive Filters