Patent Assignment
Reel/Frame 032119/0765
Assignment of Assignor's Interest
Recorded: 2014-02-03
Pages: 5
Assignors
SAGEHASHI, MASAYOSHI
Executed: 2014-01-09
HASEGAWA, KOJI
Executed: 2014-01-09
KATAYAMA, KAZUHIRO
Executed: 2014-01-09
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Monomer, Polymer, Resist Composition, and Patterning Process