Patent Assignment
Reel/Frame 032132/0632
Assignment of Assignor's Interest
Recorded: 2014-01-28
Pages: 7
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Mounting Table and Plasma Processing Apparatus