Patent Assignment
Reel/Frame 032143/0891
Assignment of Assignor's Interest
Recorded: 2014-02-05
Pages: 7
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Modifying Electrostatic Chuck and Plasma Processing Apparatus