Patent Assignment
Reel/Frame 032158/0928
Assignment of Assignor's Interest
Recorded: 2014-02-06
Pages: 4
Assignor
SHIRAKAWA, MAKOTO
Executed: 2013-12-02
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.