Patent Assignment
Reel/Frame 032174/0275
Assignment of Assignor's Interest
Recorded: 2014-02-07
Pages: 3
Assignors
MCMILLIN, BRIAN
Executed: 2014-02-06
SATO, ARTHUR
Executed: 2014-02-06
BENJAMIN, NEIL
Executed: 2014-02-06
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Hybrid Edge Ring for Plasma Wafer Processing