Patent Assignment
Reel/Frame 032190/0147
Assignment of Assignor's Interest
Recorded: 2014-02-11
Pages: 6
Assignors
KODAMA, TOSHIAKI
Executed: 2014-01-30
YAMAUCHI, TORU
Executed: 2014-01-30
KOBAYASHI, SENSHO
Executed: 2014-01-30
NAKAMURA, HIROSHI
Executed: 2014-01-30
IKEDA, GAKU
Executed: 2014-01-30
UOYAMA, KAZUYA
Executed: 2014-01-30
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 407-0192, JAPAN
Covered Property
(1)
Support Information Display Method, Maintenance Support Method of Substrate Processing Apparatus, Support Information Display Control Apparatus, Substrate Processing System and Recording Medium