Patent Assignment
Reel/Frame 032207/0857
Assignment of Assignor's Interest
Recorded: 2014-02-12
Pages: 4
Assignors
KUZNETSOV, ALEXANDER
Executed: 2014-02-05
PETERLINZ, KEVIN
Executed: 2014-02-05
SHCHEGROV, ANDREI
Executed: 2014-02-06
POSLAVSKY, LEONID
Executed: 2014-02-06
LIU, XUEFENG
Executed: 2014-02-06
Assignees
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Method of Electromagnetic Modeling of Finite Structures and Finite Illumination for Metrology and Inspection
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.