Patent Assignment
Reel/Frame 032248/0509
Assignment of Assignor's Interest
Recorded: 2014-02-19
Pages: 4
Assignors
TUNG, CHI-FENG
Executed: 2013-11-14
SHEN, HSIANG-YIN
Executed: 2013-11-14
KAO, MAO-LIN
Executed: 2013-11-14
HSIAO, CHIH-CHENG
Executed: 2013-11-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED, INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Photolithography System, Method for Transporting Photo-Mask and Unit Therein