Patent Assignment
Reel/Frame 032258/0155
Assignment of Assignor's Interest
Recorded: 2014-02-20
Pages: 5
Assignors
BUDACH, MICHAEL
Executed: 2014-01-31
BRET, TRISTAN
Executed: 2014-01-31
EDINGER, KLAUS
Executed: 2014-02-06
HOFMANN, THORSTEN
Executed: 2014-02-06
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Method and Apparatus for Analyzing and for Removing a Defect of an Euv Photomask
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.