Patent Assignment
Reel/Frame 032261/0146
Assignment of Assignor's Interest
Recorded: 2014-02-20
Pages: 5
Assignors
WU, KENONG
Executed: 2014-01-31
GAO, LISHENG
Executed: 2014-02-03
CHEN, GRACE HSIU-LING
Executed: 2014-02-04
SHORTT, DAVID W.
Executed: 2014-02-11
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Detecting Defects on a Wafer Using Defect-Specific and Multi-Channel Information