Patent Assignment
Reel/Frame 032300/0855
Assignment of Assignor's Interest
Recorded: 2014-02-26
Pages: 8
Assignors
ABARRA, EINSTEIN NOEL
Executed: 2014-02-17
KAMIYA, YASUSHI
Executed: 2014-02-19
KONNO, YUTA
Executed: 2014-02-10
Assignee
CANON ANELVA CORPORATION
2-5-1, KURIGI, ASAO-KU, KAWASAKI-SHI, 215-8550, JAPAN
Covered Property
(1)
Ion Beam Generator and Ion Beam Plasma Processing Apparatus