Patent Assignment
Reel/Frame 032301/0105
Assignment of Assignor's Interest
Recorded: 2014-02-26
Pages: 5
Assignors
SHIRAIWA, NORIO
Executed: 2014-02-24
TAMAGAWA, KOKI
Executed: 2014-02-24
KAWAI, JIRO
Executed: 2014-02-24
Assignee
SHINKO ELECTRIC INDUSTRIES CO., LTD.
80, OSHIMADA-MACHI, NAGANO-SHI,, NAGANO, 381-2287, JAPAN
Covered Property
(1)
Electrostatic Chuck Apparatus