Patent Assignment
Reel/Frame 032328/0153
Assignment of Assignor's Interest
Recorded: 2014-02-28
Pages: 4
Assignor
SUSS MICROTEC, INC.
Executed: 2014-02-26
Assignee
SUSS MICROTEC LITHOGRAPHY GMBH
SCHLEISSHEIMER STR. 90, GARCHING, 85748, GERMANY
Covered Properties
(2)
Debonding Temporarily Bonded Semiconductor Wafers
Debonding Temporary Bonded Semiconductor Wafers
Application:
61/552,140 →
Related Assignments
(2)
Other recorded transfers of the patents in this record — the chain of ownership.