Patent Assignment
Reel/Frame 032345/0201
Assignment of Assignor's Interest
Recorded: 2014-03-04
Pages: 4
Assignor
AVASARALA, BHARAT K.
Executed: 2014-02-27
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Reducing Bowing Bias in Etching an Oxide Layer