Patent Assignment
Reel/Frame 032351/0511
Assignment of Assignor's Interest
Recorded: 2014-03-05
Pages: 4
Assignor
CHANG, SHENGWU
Executed: 2014-02-14
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Method and Apparatus for Three Dimensional Ion Implantation
Application:
14/179,988 →
Publication:
US 2015/0228445