Patent Assignment
Reel/Frame 032363/0067
Assignment of Assignor's Interest
Recorded: 2014-03-06
Pages: 6
Assignors
KOO, ILWOONG
Executed: 2014-03-05
LEE, JUN
Executed: 2014-03-05
SRIVASTAVA, ASEEM K.
Executed: 2014-03-05
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Method For Implementing Low Dose Implant In A Plasma System