Patent Assignment
Reel/Frame 032371/0447
Assignment of Assignor's Interest
Recorded: 2014-03-06
Pages: 12
Assignors
SHIMANO, TAKAHIRO
Executed: 2014-03-03
TANIKAWA, MUTSUMI
Executed: 2014-03-03
MATSUO, HISANORI
Executed: 2014-03-03
YAMAGUCHI, KUNIAKI
Executed: 2014-03-03
WATANABE, KATSUHIDE
Executed: 2014-03-03
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Method of Obtaining a Sliding Distance Distribution of a Dresser on a Polishing Member, Method of Obtaining a Sliding Vector Distribution of a Dresser on a Polishing Member, and Polishing Apparatus