Patent Assignment
Reel/Frame 032397/0396
Assignment of Assignor's Interest
Recorded: 2014-03-10
Pages: 2
Assignors
KIMURA, HAJIME
Executed: 2010-07-21
OHARA, HIROKI
Executed: 2010-07-23
KAYAMA, MASAYO
Executed: 2010-07-22
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device