Patent Assignment
Reel/Frame 032402/0295
Assignment of Assignor's Interest
Recorded: 2014-03-11
Pages: 4
Assignors
CHEN, YUNG-LONG
Executed: 2014-02-19
HSU, CHUN-FENG
Executed: 2014-02-19
TSENG, HENG-YI
Executed: 2014-02-19
HUANG, CHIEH-JAN
Executed: 2014-02-19
SU, CHIN-HSING
Executed: 2014-02-19
CHEN, YUNG-CHING
Executed: 2014-02-19
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
NO.8, LI-HSIN ROAD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Gas-Supply System and Method