Patent Assignment
Reel/Frame 032411/0955
Assignment of Assignor's Interest
Recorded: 2014-03-12
Pages: 2
Assignors
EHM, DIRK HEINRICH
Executed: 2013-11-28
HUBER, PETER
Executed: 2013-12-18
MUELLENDER, STEPHAN
Executed: 2013-12-02
VON BLANCKENHAGEN, GISELA
Executed: 2013-12-16
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Reflective Optical Element and Optical System for Euv Lithography