Patent Assignment
Reel/Frame 032417/0230
Assignment of Assignor's Interest
Recorded: 2014-03-12
Pages: 3
Assignors
SWAMINATHAN, SHANKAR
Executed: 2014-01-06
KANG, HU
Executed: 2014-01-06
LAVOIE, ADRIEN
Executed: 2014-01-06
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Sub-Saturated Atomic Layer Deposition and Conformal Film Deposition