Patent Assignment
Reel/Frame 032425/0957
Assignment of Assignor's Interest
Recorded: 2014-03-13
Pages: 2
Assignors
HIMORI, SHINJI
Executed: 2014-01-29
KOBAYASHI, YOSHIYUKI
Executed: 2014-02-03
KATO, TAKEHIRO
Executed: 2014-01-29
ITO, ETSUJI
Executed: 2014-01-29
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Semiconductor Manufacturing Device and Processing Method