Patent Assignment
Reel/Frame 032426/0734
Assignment of Assignor's Interest
Recorded: 2014-03-13
Pages: 3
Assignors
DHAS, ARUL N.
Executed: 2014-03-03
SINGHAL, AKHIL
Executed: 2014-03-03
LI, MING
Executed: 2014-03-06
BOUMATAR, KAREEM
Executed: 2014-02-27
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method for the Reduction of Defectivity in Vapor Deposited Films