Patent Assignment
Reel/Frame 032430/0541
Assignment of Assignor's Interest
Recorded: 2014-03-13
Pages: 3
Assignors
SIMS, JAMES S.
Executed: 2014-02-27
HENRI, JON
Executed: 2014-02-27
KELCHNER, KATHRYN M.
Executed: 2014-02-28
JANJAM, SATHISH BABU S. V.
Executed: 2014-03-06
TANG, SHANE
Executed: 2014-02-27
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma Enhanced Atomic Layer Deposition with Pulsed Plasma Exposure