Patent Assignment
Reel/Frame 032441/0439
Assignment of Assignor's Interest
Recorded: 2014-03-14
Pages: 5
Assignors
HIROCHI, YUKITOMO
Executed: 2014-03-04
TOYODA, KAZUYUKI
Executed: 2014-03-04
MORIMITSU, KAZUHIRO
Executed: 2014-03-04
SATO, TAKETOSHI
Executed: 2014-03-04
YAMAMOTO, TETSUO
Executed: 2014-03-04
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Non-Transitory Computer-Readable Recording Medium and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.