Patent Assignment
Reel/Frame 032460/0753
Assignment of Assignor's Interest
Recorded: 2014-03-18
Pages: 3
Assignors
CHANG, YANG-HUNG
Executed: 2013-08-21
CHEN, KAI-HSIUNG
Executed: 2013-08-21
KE, CHIH-MING
Executed: 2013-08-21
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method and System for Overlay Control