Patent Assignment
Reel/Frame 032474/0466
Assignment of Assignor's Interest
Recorded: 2014-03-19
Pages: 5
Assignors
SHIMAMOTO, SATOSHI
Executed: 2014-03-10
NODA, TAKAAKI
Executed: 2014-03-11
HANASHIMA, TAKEO
Executed: 2014-03-11
HIROSE, YOSHIRO
Executed: 2014-03-12
ASHIHARA, HIROSHI
Executed: 2014-03-10
KAMAKURA, TSUKASA
Executed: 2014-03-11
NOHARA, SHINGO
Executed: 2014-03-12
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Substrate Processing System and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.