Patent Assignment
Reel/Frame 032477/0957
Assignment of Assignor's Interest
Recorded: 2014-03-19
Pages: 3
Assignee
SEN CORPORATION
1-1 OSAKI 2-CHOME, SHINAGAWA-KU, TOKYO, 141-6025, JAPAN
Covered Property
(1)
Ion Implantation Apparatus and Method of Cleaning Ion Implantation Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.