Patent Assignment
Reel/Frame 032478/0067
Assignment of Assignor's Interest
Recorded: 2014-03-19
Pages: 3
Assignor
KASAHARA, TAKAHIRO
Executed: 2014-03-12
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device