Patent Assignment
Reel/Frame 032494/0001
Assignment of Assignor's Interest
Recorded: 2014-03-21
Pages: 7
Assignors
FUNK, MERRITT
Executed: 2014-03-06
ZHAO, JIANPING
Executed: 2014-03-06
CHEN, LEE
Executed: 2014-03-06
IWAO, TOSHIHIKO
Executed: 2014-03-07
NOZAWA, TOSHIHISA
Executed: 2014-03-07
CHEN, ZHIYING
Executed: 2014-03-06
VENTZEK, PETER
Executed: 2014-03-07
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Microwave Surface-Wave Plasma Device