Patent Assignment
Reel/Frame 032499/0688
Assignment of Assignor's Interest
Recorded: 2014-03-21
Pages: 3
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Susceptor Support Shaft for Improved Wafer Temperature Uniformity and Process Repeatability