Patent Assignment
Reel/Frame 032516/0027
Assignment of Assignor's Interest
Recorded: 2014-03-25
Pages: 4
Assignors
KUBOTA, KAZUHIRO
Executed: 2014-03-07
HONDA, MASANOBU
Executed: 2014-03-07
KATSUNUMA, TAKAYUKI
Executed: 2014-03-07
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Etching Method and Semiconductor Device Manufacturing Method