Patent Assignment
Reel/Frame 032520/0716
Assignment of Assignor's Interest
Recorded: 2014-03-25
Pages: 10
Assignors
TERASAKI, MASATO
Executed: 2014-03-20
AKAE, NAONORI
Executed: 2014-03-20
HORITA, HIDEKI
Executed: 2014-03-20
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Cleaning Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.